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Review of Scientific Instruments / Volume 83 / Issue 2 / ARTICLES / Microscopy and Imaging

Rev. Sci. Instrum. 83, 023702 (2012); http://dx.doi.org/10.1063/1.3680584 (8 pages)

Effectiveness of frequency mapping on 28 nm device broken scan chain failures

S. H. Goh1, Yan Pan1, G. F. You1, Y. H. Chan1, He ran1, Thomas Herrman2, Thomas Heller2, Victor S. K. Lim1, Z. H. Mai1, Jeffrey Lam1, C. M. Chua3, W. P. Chua3, and S. H. Tan3

1GLOBALFOUNDRIES, Technology Development, New Technology Prototyping, Singapore
2GLOBALFOUNDRIES, Yield Analysis Systems, Dresden, Germany
3SEMICAPS Pte Ltd., Singapore

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(Received 26 August 2011; accepted 9 January 2012; published online 6 February 2012)

Frequency mapping methodology is an effective diagnostic tool for detection of manufacturing defects in scan chains. It analyses reflected laser modulations from toggling scan cells to localize defective scan path or scan cell. In this paper, we demonstrate experimentally that the use of solid immersion lens technology to enhance signal and spatial resolution is not a prerequisite for this technique up till 28 nm technology node. We present case studies to show the effectiveness of frequency mapping for detecting systematic and random broken scan chain failures on a 28 nm technology node test chip. We achieved 81% success rate in this methodology.

© 2012 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. HARDWARE SETUP
  3. TEST STRUCTURE
  4. DIAGNOSTIC METHODOLOGY
    1. Signal characterization
    2. Broken scan chain diagnosis
  5. EXPERIMENTAL RESULTS
    1. Front end of line defect
    2. Back-end-of-line defects
    3. Systematic defects
  6. CONCLUSIONS

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KEYWORDS, PACS, and IPC

Keywords

optical modulation, solid lasers

PACS

  • 42.60.Fc

    Modulation, tuning, and mode locking

  • 42.60.By

    Design of specific laser systems

International Patent Classification (IPC)

  • H01S3/098

    Mode locking; Mode suppression

  • H01S3/10

    Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

  • H01S3/16

    Solid materials

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3680584

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü, Appl. Phys. Lett. 78(26), 4071 (2001)APPLAB000078000026004071000001.

    S. H. Goh, C. J. R. Sheppard, A. C. T. Quah, C. M. Chua, L. S. Koh, and J. C. H. Phang, Rev. Sci. Instrum. 80(1), 013703 (2009)RSINAK000080000001013703000001.


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