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Review of Scientific Instruments / Volume 83 / Issue 2 / ARTICLES / Microscopy and Imaging

Rev. Sci. Instrum. 83, 023701 (2012); http://dx.doi.org/10.1063/1.3680111 (6 pages)

A new TriBeam system for three-dimensional multimodal materials analysis

McLean P. Echlin, Alessandro Mottura, Christopher J. Torbet, and Tresa M. Pollock

Materials Department, University of California at Santa Barbara, Santa Barbara, California 93101, USA

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(Received 4 October 2011; accepted 8 January 2012; published online 3 February 2012)

The unique capabilities of ultrashort pulse femtosecond lasers have been integrated with a focused ion beam (FIB) platform to create a new system for rapid 3D materials analysis. The femtosecond laser allows for in situ layer-by-layer material ablation with high material removal rates. The high pulse frequency (1 kHz) of ultrashort (150 fs) laser pulses can induce material ablation with virtually no thermal damage to the surrounding area, permitting high resolution imaging, as well as crystallographic and elemental analysis, without intermediate surface preparation or removal of the sample from the chamber. The TriBeam system combines the high resolution and broad detector capabilities of the DualBeamTM microscope with the high material removal rates of the femtosecond laser, allowing 3D datasets to be acquired at rates 4–6 orders of magnitude faster than 3D FIB datasets. Design features that permit coupling of laser and electron optics systems and positioning of a stage in the multiple analysis positions are discussed. Initial in situ multilayer data are presented.

© 2012 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. SYSTEM DESIGN
    1. DualBeam TM FIB/SEM
    2. Femtosecond laser
    3. Optical setup
    4. Optical feed-through port
    5. Microstage
    6. Energy Dispersive Spectroscopy Detector
    7. Electron Backscatter Diffraction Detector
  3. CALIBRATION AND INTEGRATION
    1. Stage control
    2. Laser beam alignment
    3. Beam control
    4. Ablation parameters
  4. PRELIMINARY DATA
  5. CONCLUSIONS

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KEYWORDS, PACS, and IPC

Keywords

focused ion beam technology, high-speed optical techniques, laser ablation, multilayers, scanning electron microscopes

PACS

  • 07.78.+s

    Electron, positron, and ion microscopes; electron diffractometers

International Patent Classification (IPC)

  • H01J37/26

    Electron or ion microscopes; Electron- or ion-diffraction tubes

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3680111

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    M. Groeber, B. Haley, M. Uchic, and S. Ghosh, AIP Conf. Proc. 712, 1712 (2004)APCPCS000712000001001712000001.

    J. McDonald, S. Ma, T. Pollock, S. Yalisove, and J. Nees, J. Appl. Phys. 103, 093111 (2008)JAPIAU000103000009093111000001.

    Y. Hirayama and M. Obara, J. Appl. Phys. 97, 064903 (2005)JAPIAU000097000006064903000001.


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