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Review of Scientific Instruments / Volume 83 / Issue 2 / ARTICLES / Particle Sources, Optics and Acceleration; Particle Detectors

Rev. Sci. Instrum. 83, 023301 (2012); http://dx.doi.org/10.1063/1.3680105 (6 pages)

Characteristics of low-energy ion beams extracted from a wire electrode geometry

M. Vasquez, Jr.1, S. Tokumura1, T. Kasuya1, S. Maeno2, and M. Wada3

1Graduate School of Engineering, Doshisha University, Kyotanabe, Kyoto 610-0321, Japan
2Novelion Systems Co. Ltd., Kyotanabe, Kyoto 610-0332, Japan
3Faculty of Life and Medical Sciences, Doshisha University, Kyotanabe, Kyoto 610-0321, Japan

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(Received 16 October 2011; accepted 5 January 2012; published online 2 February 2012)

Beams of argon ions with energies less than 50 eV were extracted from an ion source through a wire electrode extractor geometry. A retarding potential energy analyzer (RPEA) was constructed in order to characterize the extracted ion beams. The single aperture RPEA was used to determine the ion energy distribution function, the mean ion energy and the ion beam energy spread. The multi-cusp hot cathode ion source was capable of producing a low electron temperature gas discharge to form quiescent plasmas from which ion beam energy as low as 5 eV was realized. At 50 V extraction potential and 0.1 A discharge current, the ion beam current density was around 0.37 mA/cm2 with an energy spread of 3.6 V or 6.5% of the mean ion energy. The maximum ion beam current density extracted from the source was 0.57 mA/cm2 for a 50 eV ion beam and 1.78 mA/cm2 for a 100 eV ion beam.

© 2012 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL DETAILS
  3. RESULTS
  4. DISCUSSION
  5. CONCLUSION

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KEYWORDS, PACS, and IPC

Keywords

argon, discharges (electric), ion beams, ion sources, particle beam extraction, plasma sources, plasma temperature, plasma transport processes

PACS

International Patent Classification (IPC)

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3680105

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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