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Review of Scientific Instruments / Volume 82 / Issue 5 / ARTICLES / Microscopy and Imaging

Rev. Sci. Instrum. 82, 053701 (2011); http://dx.doi.org/10.1063/1.3587624 (4 pages)

A piezo-thermal probe for thermomechanical analysis

Angelo Gaitas1,2, Sachi Gianchandani1, and Weibin Zhu1

1PicoCal, Inc., 333 Parkland Plaza, Ann Arbor, Michigan 48103, USA
2Delft University of Technology, Mekelweg 4, 2628CD, Delft, The Netherlands

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(Received 28 December 2010; accepted 17 April 2011; published online 10 May 2011)

Thermomechanical analysis (TMA) is widely used to characterize materials and determine transition temperatures and thermal expansion coefficients. Atomic-force microscopy (AFM) microcantilevers have been used for TMA. We have developed a micromachined probe that includes two embedded sensors: one for measuring the mechanical movement of the probe (deflection) and another for providing localized heating. The new probe reduces costs and complexity and allow for portability thereby eliminating the need for an AFM. The sensitivity of the deflection element ((ΔR/R)/deflection) is 0.1 ppm/nm and its gauge factor is 3.24. The melting temperature of naphthalene is measured near 78.5  °C.

© 2011 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. DEVICE and FABRICATION
  3. SCANNING SYSTEM
  4. EXPERIMENTAL RESULTS
    1. Displacement sensing
    2. Thermomechanical analysis
  5. CONCLUSION

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KEYWORDS and PACS

Keywords

atomic force microscopy, micromachining, micromechanical devices, microsensors, piezoelectric devices, thermal expansion

PACS

  • 07.07.Df

    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

  • 85.50.-n

    Dielectric, ferroelectric, and piezoelectric devices

  • 07.79.Lh

    Atomic force microscopes

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 81.16.-c

    Methods of micro- and nanofabrication and processing

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3587624

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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    References

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    A. Gaitas, W. Zhu, N. Gulari, E. Covington, and C. Kurdak, Appl. Phys. Lett. 95, 153108 (2009)APPLAB000095000015153108000001.

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    J.-H. Lee and Y. B. Gianchandani, Rev. Sci. Instrum. 75, 1222 (2004)RSINAK000075000005001222000001.

    B. A. Nelson and W. P. King, Rev. Sci. Instrum. 78, 023702 (2007)RSINAK000078000002023702000001.


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