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Rev. Sci. Instrum. 82, 043704 (2011); http://dx.doi.org/10.1063/1.3575321 (5 pages)

Experimental observation of contact mode cantilever dynamics with nanosecond resolution

O. D. Payton1, L. Picco1, A. R. Champneys2, M. E. Homer2, M. J. Miles1, and A. Raman3

1H. H. Wills Physics Laboratory, University of Bristol, Tyndall Avenue, Bristol BS8 1TL, United Kingdom
2University of Bristol, Queens Bluilding, University Walk, Bristol BS8 1TR, United Kingdom
3School of Mechanical Engineering, Purdue University, 585 Purdue Mall, West Lafayette, Indiana 47907-2088, USA

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(Received 25 January 2011; accepted 18 March 2011; published online 13 April 2011)

We report the use of a laser Doppler vibrometer to measure the motion of an atomic force microscope contact mode cantilever during continuous line scans of a mica surface. With a sufficiently high density of measurement points the dynamics of the entire cantilever beam, from the apex to the base, can be reconstructed. We demonstrate nanosecond resolution of both rectangular and triangular cantilevers. This technique permits visualization and quantitative measurements of both the normal and lateral tip sample interactions for the first and higher order eigenmodes. The ability to derive quantitative lateral force measurements is of interest to the field of microtribology/nanotribology while the comprehensive understanding of the cantilever's dynamics also aids new cantilever designs and simulations.

© 2011 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. METHOD
  3. RESULTS
  4. CONCLUSION

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KEYWORDS and PACS

PACS

  • 07.79.Lh

    Atomic force microscopes

  • 07.10.Cm

    Micromechanical devices and systems

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 46.80.+j

    Measurement methods and techniques in continuum mechanics of solids

  • 42.62.Eh

    Metrological applications; optical frequency synthesizers for precision spectroscopy

ARTICLE DATA

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

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