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Review of Scientific Instruments / Volume 82 / Issue 12 / ARTICLES / Microscopy and Imaging

Rev. Sci. Instrum. 82, 123703 (2011); http://dx.doi.org/10.1063/1.3664613 (8 pages)

Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed

Brian J. Kenton1, Andrew J. Fleming2, and Kam K. Leang1

1Department of Mechanical Engineering, University of Nevada Reno, Reno, Nevada 89557-0312, USA
2School of Electrical Engineering and Computer Science, University of Newcastle, NSW 2308, Australia

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(Received 5 April 2011; accepted 31 October 2011; published online 13 December 2011)

The mechanical design of a high-bandwidth, short-range vertical positioning stage is described for integration with a commercial scanning probe microscope (SPM) for dual-stage actuation to significantly improve scanning performance. The vertical motion of the sample platform is driven by a stiff and compact piezo-stack actuator and guided by a novel circular flexure to minimize undesirable mechanical resonances that can limit the performance of the vertical feedback control loop. Finite element analysis is performed to study the key issues that affect performance. To relax the need for properly securing the stage to a working surface, such as a laboratory workbench, an inertial cancellation scheme is utilized. The measured dominant unloaded mechanical resonance of a prototype stage is above 150 kHz and the travel range is approximately 1.56 μm. The high-bandwidth stage is experimentally evaluated with a basic commercial SPM, and results show over 25-times improvement in the scanning performance.

© 2011 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. MECHANICAL DESIGN
    1. Dual-stage actuation for SPMs
    2. Optimizing the mechanical response
    3. Circular flexure design
    4. Inertial cancellation
  3. EXPERIMENTAL RESULTS AND DISCUSSION
    1. Manufacturing and assembly
    2. Dynamic response and range
    3. AFM imaging results and discussion
  4. CONCLUSIONS

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KEYWORDS and PACS

Keywords

atomic force microscopy, finite element analysis, piezoelectric actuators, scanning probe microscopy

PACS

  • 07.79.-v

    Scanning probe microscopes and components

  • 02.70.Dh

    Finite-element and Galerkin methods

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3664613

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    A. J. Fleming, Rev. Sci. Instrum. 80, 104701 (2009)RSINAK000080000010104701000001.

    G. E. Fantner, P. Hegarty, J. H. Kindt, G. Schitter, G. A. G. Cidade, and P. K. Hansma, Rev. Sci. Instrum. 76, 026118 (2005)RSINAK000076000002026118000001.


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