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Review of Scientific Instruments / Volume 79 / Issue 7 / INVITED REVIEW ARTICLE

Rev. Sci. Instrum. 79, 071101 (2008); doi:10.1063/1.2957649 (11 pages)

Invited Review Article: Accurate and fast nanopositioning with piezoelectric tube scanners: Emerging trends and future challenges

S. O. Reza Moheimani

School of Electrical Engineering and Computer Science, The University of Newcastle, University Drive, New South Wales 2308, Australia

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(Received 1 April 2008; accepted 21 June 2008; published online 21 July 2008)

Piezoelectric tube scanners have emerged as the most widely used nanopositioning technology in modern scanning probe microscopes. Despite their impressive properties, their fast and accurate operations are hindered due to complications such as scan induced mechanical vibrations, hysteresis nonlinearity, creep, and thermal drift. This paper presents an overview of emerging innovative solutions inspired from recent advances in fields such as smart structures, feedback control, and advanced estimation aimed at maximizing positioning precision and bandwidth of piezoelectric tube scanners. The paper presents a thorough survey of the related literature and contains suggestions for future research prospects.

© 2008 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. SCANNING PROBE MICROSCOPY
  3. ELECTROMECHANICAL PROPERTIES OF A PIEZOELECTRIC TUBE SCANNER
    1. Mechanical construction
    2. Mechanical deflection
    3. Resonant nature
    4. Hysteresis, creep, and thermal drift
    5. Feedback
  4. ELECTRICAL MODEL OF A PIEZOELECTRIC TUBE
    1. Use of piezoelectric voltage in a feedback loop
    2. Sensorless control of a tube
  5. FUTURE CHALLENGES AND CONCLUSION

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KEYWORDS and PACS

Keywords

feedback, intelligent structures, nanopositioning, piezoelectric devices, reviews, scanning probe microscopy

PACS

  • 07.79.-v

    Scanning probe microscopes and components

  • 85.50.-n

    Dielectric, ferroelectric, and piezoelectric devices

  • 81.16.Ta

    Atom manipulation

  • 37.10.-x

    Atom, molecule, and ion cooling methods

  • 06.60.Sx

    Positioning and alignment; manipulating, remote handling

  • 01.30.Rr

    Surveys and tutorial papers; resource letters

ARTICLE DATA

Permalink
http://link.aip.org/link/doi/10.1063/1.2957649

PUBLICATION DATA

ISSN:

0034-6748 (print)  
1089-7623 (online)

Publisher:

$abstract.society.value is a Member of CrossRef American Institute of Physics

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