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Review of Scientific Instruments / Volume 79 / Issue 6 / OPTICS; ATOMS AND MOLECULES; SPECTROSCOPY; PHOTON DETECTORS

Rev. Sci. Instrum. 79, 063101 (2008); http://dx.doi.org/10.1063/1.2936262 (4 pages)

Direct measurement of beam size in a spectroscopic ellipsometry setup

Arthur Tay1, Tuck Wah Ng2, Yuheng Wang1, and Shao Zhao1

1Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
2Department of Mechanical Engineering, Monash University, Clayton, Victoria 3800, Australia

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(Received 21 December 2007; accepted 3 May 2008; published online 2 June 2008)

Spectroscopic ellipsometry signals used in thin film analysis are dependent on the beam probe size. In this work, we report a technique to determine the beam size that uses the existing detection facilities in a spectroscopic ellipsometry setup without the need to rearrange the optical components. The intensity signal recorded with the technique comprises a coupled boundary diffraction and knife edge wave that can be isolated using nonlinear fitting. This then permitted an accurate measurement of the beam size with the stronger knife edge component. The technique has the added advantage of picking up chromatic aberration in the probing lens which may be a factor in ellipsometry measurement.

© 2008 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. TECHNIQUE DESCRIPTION
  3. EXPERIMENT AND RESULTS
  4. CONCLUSION

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KEYWORDS and PACS

Keywords

aberrations, ellipsometry, thin films

PACS

  • 07.60.Fs

    Polarimeters and ellipsometers

  • 78.20.-e

    Optical properties of bulk materials and thin films

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.2936262

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998)RSINAK000069000004001800000001.

    T. W. Ng, S. L. Foo, and H. Y. Tan, Rev. Sci. Instrum. 76, 065110 (2005)RSINAK000076000006065110000001.


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