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Rev. Sci. Instrum. 79, 103901 (2008); doi:10.1063/1.2981693 (6 pages)

Integrated setup for the fabrication and measurement of magnetoresistive nanoconstrictions in ultrahigh vacuum

Daniel Stickler, Robert Frömter, Wei Li, André Kobs, and Hans Peter Oepen

Institut für Angewandte Physik, Universität Hamburg, Jungiusstr. 11, 20355 Hamburg, Germany Map This map

(Received 5 June 2008; accepted 24 August 2008; published online 3 October 2008)

A UHV instrument is presented for in situ fabrication of nanostructures and in situ investigation of their magnetoresistance. Nanostructures of diverse shape and size are created from thin films utilizing a focused ion beam. The magnetic nanostructures are contacted via a micromanipulator, which makes it possible to address the individual structures. The system is additionally equipped with a scanning electron microscope column, which is used for damage-free navigation and control of the structuring and contacting. First magnetoresistance measurements of structures carved into a Permalloy film demonstrate the high sensitivity and the flexibility of the new setup.

© 2008 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 81.16.Ta

    Atom manipulation

  • 75.50.Tt

    Fine-particle systems; nanocrystalline materials

  • 07.78.+s

    Electron, positron, and ion microscopes; electron diffractometers

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 07.30.-t

    Vacuum apparatus

  • 73.50.Jt

    Galvanomagnetic and other magnetotransport effects (including thermomagnetic effects)

PUBLICATION DATA

ISSN:

0034-6748 (print)  
1089-7623 (online)

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