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Rev. Sci. Instrum. 79, 103704 (2008); http://dx.doi.org/10.1063/1.2980377 (14 pages)
High bandwidth control of precision motion instrumentation
(Received 4 June 2008; accepted 20 August 2008; published online 15 October 2008)
© 2008 American Institute of Physics
Article Outline
- INTRODUCTION
- SYSTEM DESCRIPTION
- Frequency regions
- Feedback control
- Feedforward control
- ITERATIVE LEARNING CONTROL
- First-order ILC algorithm
- ILC analysis
- Convergence
- ILC asymptotic performance
- HIGH-BANDWIDTH LEARNING ALGORITHM DESIGN
- Learning filter
L
- Construction of
inv(z)
- d -step delayed inversion
- Stabilization of the inversion
- Noncausal delay correction
- Learning rate selection
- Construction of
- LTI
Q
design
- Zero-phase filter construction
- Bandwidth selection
- Learning filter
L
- AN ADVANCED
Q
DESIGN FOR NONSMOOTH TRAJECTORIES
- Time-varying Q -filter
- Time-frequency analysis
- Filter shaping
- Parameter tuning
- APPLICATION: PARALLEL KINEMATIC MECHANISM
- Feedback control results
- ILC1: LTI Q -filter
- ILC2: LTV Q -filter
- CONCLUSIONS
RELATED DATABASES
KEYWORDS and PACS
ARTICLE DATA
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F. J. Giessibl, Rev. Mod. Phys. 75, 949 (2003).
S. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka, Rev. Sci. Instrum. 73, 3232 (2002)RSINAK000073000009003232000001.
Y. Li and J. Bechhoefer, Rev. Sci. Instrum. 78, 013702 (2007)RSINAK000078000001013702000001.
Q. Zou, C. V. Giessen, J. Garbini, and S. Devasia, Rev. Sci. Instrum. 76, 023701 (2005)RSINAK000076000002023701000001.
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