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Review of Scientific Instruments / Volume 79 / Issue 10 / NUCLEAR PHYSICS, FUSION AND PLASMAS

Rev. Sci. Instrum. 79, 103504 (2008); http://dx.doi.org/10.1063/1.2999906 (5 pages)

Low temperature plasma diagnostics with tunable synchrotron vacuum ultraviolet photoionization mass spectrometry

Jing Wang1, Yuyang Li1, Zhenyu Tian1, Taichang Zhang1, Fei Qi1, and Xiaoping Tao2

1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, People’s Republic of China
2Department of Astronomy and Applied Physics, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China

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(Received 11 July 2008; accepted 21 September 2008; published online 21 October 2008)

Plasma-based technology is of great importance for a range of industrial applications. However, due to the complexity of gas-phase and surface chemical reactions, the underlying plasma chemistry is still poorly understood, leading to a growing demand for experimental setups on plasma diagnostics. In this paper, we report an apparatus that combines tunable synchrotron vacuum ultraviolet (VUV) photoionization with molecular-beam mass spectrometry for detecting ionic and neutral species formed in the processes of plasma discharge. The products including reactive intermediates such as enols can be identified unambiguously with the measurements of photoionization mass spectrometry (PIMS) and photoionization efficiency spectra. The tunable VUV PIMS has been proven as an ideal and sensitive tool for a comprehensive understanding of plasma chemistry.

© 2008 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL SETUP
    1. The tunable VUV light source
    2. The plasma discharge system
    3. The ion signal detection and data acquisition
  3. PERFORMACE OF THE APPARATUS
    1. Photoionization mass spectrometry
    2. Detection of stable molecules
    3. Detection of free radicals
    4. Detection of reactive intermediates
  4. SUMMARY

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KEYWORDS and PACS

Keywords

discharges (electric), mass spectroscopy, photoionisation, plasma chemistry, plasma diagnostics, synchrotron radiation, ultraviolet spectra

PACS

  • 52.70.Kz

    Optical (ultraviolet, visible, infrared) measurements

  • 52.80.-s

    Electric discharges

  • 52.20.Hv

    Atomic, molecular, ion, and heavy-particle collisions

  • 82.33.Xj

    Plasma reactions (including flowing afterglow and electric discharges)

  • 07.75.+h

    Mass spectrometers

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.2999906

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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