RSI Nameplate
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter UniPHY Group iResearch App Facebook

Review of Scientific Instruments / Volume 79 / Issue 10 / OPTICS; ATOMS AND MOLECULES; SPECTROSCOPY; PHOTON DETECTORS

Rev. Sci. Instrum. 79, 103106 (2008); http://dx.doi.org/10.1063/1.2999919 (3 pages)

Rapid photoreflectance spectroscopy for strained silicon metrology

H. Chouaib1, M. E. Murtagh1, V. Guènebaut1, S. Ward1, P. V. Kelly1, M. Kennard2, Y. M. Le Vaillant2, M. G. Somekh3, M. C. Pitter3, and S. D. Sharples3

1Optical Metrology Innovations Ltd., 2200 Cork Airport Business Park, Cork Airport, Co. Cork, Ireland
2Soitec S.A., Parc Technologies des Fontaines, 38190 Bernin, France
3Department of Electronic Engineering, University of Nottingham, University Park, Nottingham NG7 2RD, England

View MapView Map

(Received 7 August 2008; accepted 22 September 2008; published online 22 October 2008)

We present an improved photoreflectance (PR) spectroscopy technique upon the prior art in providing a rapid acquisition method of the PR spectrum in a simultaneous and multiplexed manner. Rapid PR (RPR) application is the on-line monitoring of strained silicon. Shrinkage in the silicon bandgap is measured and converted to strain, using theoretical models. Experimental RPR results are in good correlation with Raman spectroscopy.

© 2008 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL RESULTS AND MODELS
  3. CONCLUSION

RELATED DATABASES

To view database links for this article, you need to log in.

KEYWORDS and PACS

Keywords

elemental semiconductors, energy gap, piezoelectricity, Raman spectra, reflectivity, silicon

PACS

  • 78.20.hb

    Piezo-optical, elasto-optical, acousto-optical, and photoelastic effects

  • 78.30.Am

    Elemental semiconductors and insulators

  • 71.20.Mq

    Elemental semiconductors

  • 77.65.-j

    Piezoelectricity and electromechanical effects

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.2999919

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    Y. Saito, M. Motohashni, N. Hayazawa, M. Iyoki, and S. Kawata, Appl. Phys. Lett. 88, 143109 (2006)APPLAB000088000014143109000001.

    S. Richard, F. Aniel, G. Fishman, and N. Cavassilas, J. Appl. Phys. 94, 1795 (2003)JAPIAU000094000003001795000001.


For access to citing articles, you need to log in.


Figures (3) Tables (1)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)



Close

Google Calendar

ADVERTISEMENT

Your Recent History Recent History Help

Recently Viewed

  1. Rapid photoreflectance spectroscopy for strained silicon metrology
  2. Portable light-emitting diode-based photometer with one-shot optochemical sensors for measurement in the field
  3. A widely tunable laser frequency offset lock with digital counting
  4. 300 mm reference wafer fabrication by using direct laser lithography
  5. A new magneto-optical trap-target recoil ion momentum spectroscopy apparatus for ion-atom collisions and trapped atom studies
Go to AIP Home
Copyright © American Institute of Physics
close