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Oct 2004

Volume 75, Issue 10, pp. 3091-4349

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back to top MICROSCOPY AND IMAGING

Low-temperature field emission system for development of ultracoherent electron beams

B. Cho, T. Ogawa, T. Ichimura, T. Ichinokawa, T. Amakusa, and C. Oshima

Rev. Sci. Instrum. 75, 3091 (2004); http://dx.doi.org/10.1063/1.1790581 (6 pages) | Cited 5 times

Online Publication Date: 20 September 2004

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Here, we present the design and test-operation performance of a low-temperature field emission (FE) system which can be employed to image and characterize the FE beam from low-temperature tips. Three radiation shields cooled by liquid helium and liquid nitrogen cryostats surround the FE tips and anodes completely. Once the FE system is cooled down to 5 K, experiments can run for more than 15 h without interruption. The design allows not only for the exchange of tips and anodes by load-lock equipment but also for the adjustment of tip–anode distance using a piezo-tube. Test runs in projection microscopy mode have presented clear diffraction-fringe patterns near the shadows of nano objects at temperatures from room temperature to 5.5 K, indicating that the system is well suited for the investigation of the coherence of electron beam from FE tip.
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07.78.+s Electron, positron, and ion microscopes; electron diffractometers
41.75.Fr Electron and positron beams
41.85.Ar Particle beam extraction, beam injection

Contrast and resolution in direct Fresnel diffraction phase-contrast imaging with partially coherent x-ray source

Shensheng Han, Hong Yu, Jing Cheng, Chen Gao, and Zhenlin Luo

Rev. Sci. Instrum. 75, 3146 (2004); http://dx.doi.org/10.1063/1.1790560 (6 pages) | Cited 4 times

Online Publication Date: 20 September 2004

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A general treatment of x-ray image formation by direct Fresnel diffraction with partially coherent hard x rays is presented. Contrast and resolution are the criteria used to specify the visibility of an image, which depend primarily on the spatial coherence of the illumination and the distance from object to the image, with chromatic coherence of lesser importance. The dependence of the quality of phase-contrast images on the parameters of in-line imaging configuration is described quantitatively. The influence of spatial coherence of hard x-ray source on the imaging quality is also discussed based on the partially coherent direct Fresnel diffraction phase-contrast imaging theory. Experimental results are also presented for phase-contrast x-ray images with partially coherent hard x rays.
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07.85.-m X- and γ-ray instruments
07.05.Pj Image processing

Microtomography and improved resolution in cathodoluminescence microscopy using confocal mirror optics

D. S. H. Chan, Y. Y. Liu, J. C. H. Phang, E. Rau, R. Sennov, and A. V. Gostev

Rev. Sci. Instrum. 75, 3191 (2004); http://dx.doi.org/10.1063/1.1790551 (9 pages) | Cited 1 time

Online Publication Date: 20 September 2004

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Cathodoluminescence in scanning electron microscopy observed using an ellipsoidal confocal light collector system can offer improved resolution and an implementation of microtomography. With this signal collection system, the resolution limit is no longer determined by the beam and specimen properties but by the system optics. This possibility is demonstrated by the modeling of light transport in cathodoluminescent materials and in the ellipsoidal confocal system which collects the light emission. The conditions for the high-resolution three-dimensional visualization of microstructure within the generation volume of cathodoluminescence emission is described.
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42.79.Bh Lenses, prisms and mirrors
78.60.Hk Cathodoluminescence, ionoluminescence
07.60.Pb Conventional optical microscopes
07.78.+s Electron, positron, and ion microscopes; electron diffractometers
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
85.60.Gz Photodetectors (including infrared and CCD detectors)

Fabrication of super-sharp nanowire atomic force microscope probes using a field emission induced growth technique

A. B. H. Tay and J. T. L. Thong

Rev. Sci. Instrum. 75, 3248 (2004); http://dx.doi.org/10.1063/1.1791321 (8 pages) | Cited 15 times

Online Publication Date: 20 September 2004

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A relatively simple and consistent technique based on field emission induced growth has been developed to grow a single metallic nanowire on an atomic force microscope (AFM) tip. A clamping setup with two micromanipulators ensures that the fabrication of a vertically aligned nanowire probe, which is sharp, robust, and with high aspect ratio, can be achieved on different types of AFM cantilevers with different force constants. The controlled growth technique has been used to produce tungsten nanowire AFM probes with great consistency and high reproducibility. The tungsten nanowires were grown to lengths between 100 nm to 1.5 μm with radius of curvature at the tip end typically between 1–2 nm. Experiments using the fabricated tungsten nanowire AFM probe demonstrate its ability to produce high-resolution AFM images and improved profiling of structures with steep sidewalls due to its very sharp tip and high aspect ratio. The technique can be extended to fabricating other types of metallic nanowire AFM probes or even composite nanowire AFM probes by using different precursor gases. Experiments have been successful in fabricating cobalt nanowire AFM probes which are able to produce good high-resolution AFM images as well.
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81.07.Bc Nanocrystalline materials
61.46.-w Structure of nanoscale materials
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
81.15.-z Methods of deposition of films and coatings; film growth and epitaxy
68.37.Ps Atomic force microscopy (AFM)
79.70.+q Field emission, ionization, evaporation, and desorption
06.60.Sx Positioning and alignment; manipulating, remote handling
68.55.A- Nucleation and growth
68.55.-a Thin film structure and morphology

Submicron resolution infrared microscopy by use of a near-field scanning optical microscope with an apertured cantilever

Tatsuhiro Masaki, Yasushi Inouye, and Satoshi Kawata

Rev. Sci. Instrum. 75, 3284 (2004); http://dx.doi.org/10.1063/1.1784567 (4 pages) | Cited 5 times

Online Publication Date: 22 September 2004

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We extend the spectral range of near-field infrared microscopy attaining submicron resolution by using tunable infrared radiation generated by difference frequency generation and an apertured cantilever. The custom-built cantilever has a hollow tip with a wide opening angle and offers two orders of magnitude higher optical throughput than that of other IR probes. In near-field observation of a line/space structured poly(methylmethacrylate) film at a 5.78 μm wavelength corresponding to absorption band of the C = O bonds, the microscope achieved a λ/7 spatial resolution, less than 1 μm. This shows the possibility of submicron resolution infrared microscopy in the fingerprint region.
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07.79.Fc Near-field scanning optical microscopes
07.57.Ty Infrared spectrometers, auxiliary equipment, and techniques
68.37.Uv Near-field scanning microscopy and spectroscopy
61.41.+e Polymers, elastomers, and plastics
78.66.Qn Polymers; organic compounds
42.70.Jk Polymers and organics
78.35.+c Brillouin and Rayleigh scattering; other light scattering

In-plane measurements of microelectromechanical systems vibrations with nanometer resolution using the correlation of synchronous images

B. Serio, J. J. Hunsinger, and B. Cretin

Rev. Sci. Instrum. 75, 3335 (2004); http://dx.doi.org/10.1063/1.1791337 (7 pages) | Cited 11 times

Online Publication Date: 24 September 2004

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We report on the development of a versatile vibrometer for characterizing in-plane microelectromechanical systems (MEMS) motion. It combines conventional optical components (microscope objective or macrozoom lens) and a home-made light-emitting diode (LED) stroboscope with incremental phase shifts. The system drives a digital charge-coupled device camera to record a video sequence of the moving MEMS “frozen” by the strobe LED at four equally spaced phases. The periodic motion of the specimen is accurately estimated by computing the values of displacements between successive images. We obtained the subpixel accuracy using an interpolation and correlation motion estimation algorithm. By using this technique, we analyzed vibrations of a silicon microprobe made for scanning probe microscopy. We determined both its natural vibration and mode shapes. The nanometer resolution of the displacement is reached using a microscope, and the mode shapes are imaged using a macrolens with a large field of view (10 mm). The experiments showed a good agreement with analytical predictions.
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
07.10.-h Mechanical instruments and equipment
46.40.-f Vibrations and mechanical waves
62.40.+i Anelasticity, internal friction, stress relaxation, and mechanical resonances
07.05.Pj Image processing
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