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Jul 2002

Volume 73, Issue 7, pp. 2505-2799

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High-frequency near-field microscopy

Björn T. Rosner and Daniel W. van der Weide

Rev. Sci. Instrum. 73, 2505 (2002); http://dx.doi.org/10.1063/1.1482150 (21 pages) | Cited 73 times

Online Publication Date: 21 June 2002

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Conventional optics in the radio frequency (rf) through far-infrared (FIR) regime cannot resolve microscopic features since resolution in the far field is limited by wavelength. With the advent of near-field microscopy, rf and FIR microscopy have gained more attention because of their many applications including material characterization and integrated circuit testing. We provide a brief historical review of how near-field microscopy has developed, including a review of visible and infrared near-field microscopy in the context of our main theme, the principles and applications of near-field microscopy using millimeter to micrometer electromagnetic waves. We discuss and compare aspects of the remarkably wide range of different near-field techniques, which range from scattering type to aperture to waveguide structures. © 2002 American Institute of Physics.
Show PACS
07.79.Fc Near-field scanning optical microscopes
01.65.+g History of science
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