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Feb 2001

Volume 72, Issue 2, pp. 1270-1601

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back to top GENERAL INSTRUMENTS

A novel pressure array sensor based on contact resistance variation: Metrological properties

Z. Del Prete, L. Monteleone, and R. Steindler

Rev. Sci. Instrum. 72, 1548 (2001); http://dx.doi.org/10.1063/1.1340561 (6 pages) | Cited 11 times

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Show Abstract
The working principle and the metrological performances of a novel array sensor devoted to pressure map measurements are experimentally analyzed here. The physical principle on which the sensor elements are sensitive to the pressure is the variation of the contact resistance. Pressure maps from 1 up to 500 kPa can be measured. The prototype here utilized for the metrological characterization has been an 8×8 matrix sensor with a 5 mm spatial resolution over both x and y direction and a total thickness of 150 μm. The materials that have been chosen to assemble the prototype yielded to a very flexible and robust sensor which can easily be fitted over round surfaces without being damaged or leading to an alteration of its measuring properties. The static and the dynamic metrological performances of the sensor that have been studied and discussed are the response function and the calibration curve, the repeatability, the sensitivity, the time drift, the hysteresis, and the dynamic response. In spite of its functional and constructive simplicity, the metrological performances the sensor has exhibited, together with its peculiar constructive feature, have indicated the possibility to utilize it to effectively measure pressure maps in every application for which the sensor could be shaped in. © 2001 American Institute of Physics.
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07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Optical strain sensor using median density grating foil: Rivaling the electric strain gauge

Bing Zhao, Huimin Xie, and Anand Asundi

Rev. Sci. Instrum. 72, 1554 (2001); http://dx.doi.org/10.1063/1.1336825 (5 pages) | Cited 6 times

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In this article, a novel compact optical diffraction strain sensor using medium density grating foil is presented. The grating, generally with a frequency of 300–500 lines/mm attached on the surface of a specimen, is illuminated by a focused laser beam. The centroids of diffracted beam spots from the grating are automatically determined with two position-sensitive detector sensors connected to a personal computer. The shift of second-order diffracted beam spots due to the specimen deformation is then detected. The influences of noise sources and system geometry on system performances, such as sensitivity, spatial resolution, strain range, and measurement linearity are discussed. Strain sensitivity of 1.3 microstrain can be achieved. The spatial resolution for strain measurement of 0.4 mm is attainable. The system can be used for continuous measurement and for both static and dynamic tests. © 2001 American Institute of Physics.
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07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
07.10.Pz Instruments for strain, force, and torque
42.79.Dj Gratings

Ion beam milling fabrication of a small off-axis ellipsoidal mirror, diffraction limited to 1 μm resolution at 14 nm

Raymond Mercier, Michel Mullot, Michel Lamare, and Gérard Tissot

Rev. Sci. Instrum. 72, 1559 (2001); http://dx.doi.org/10.1063/1.1340562 (6 pages) | Cited 1 time

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One interest of extreme ultraviolet wavelengths is their potentially high optical resolution. Such optics require high precision, low roughness surfaces onto which will be deposed adequate multilayers giving near-normal incidence reflection. For a spatially resolved interferometer, we have manufactured and tested with a reasonable degree of confidence an 8×8 mm off-axis ellipsoidal mirror, below the diffraction limit for a 14 nm wavelength. The ion beam milling technique employed for the fabrication allows to preserve the low roughness of the initial spherical substrate, and although we only achieved a 0.4 nm root-mean-square roughness, better could easily be done. At these precisions, testing is as important and as difficult as the figuring itself. The resulting mirror combines high theoretical resolution (1 μm) over a large object field (∼1 mm in diameter). © 2001 American Institute of Physics.
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42.82.Cr Fabrication techniques; lithography, pattern transfer
81.20.Wk Machining, milling
42.79.Bh Lenses, prisms and mirrors
07.85.Fv X- and γ-ray sources, mirrors, gratings, and detectors
06.60.Vz Workshop procedures (welding, machining, lubrication, bearings, etc.)
07.60.Ly Interferometers

Analysis of a novel flexure hinge with three degrees of freedom

Feng-Zone Hsiao and Tai-Wu Lin

Rev. Sci. Instrum. 72, 1565 (2001); http://dx.doi.org/10.1063/1.1340024 (9 pages) | Cited 11 times

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The flexure hinge is widely used as the mechanism for a high precision positioning stage with a micrometer or nanometer resolution. In this article we propose a novel flexure hinge with three degrees of freedom in which the motions are restricted in the same plane. An analysis model is developed to analyze the flexure hinge. The results obtained are consistent with those of the finite element method. A characteristic study using the proposed model shows that this flexure hinge has a feature of linear load displacement. In addition, the most effective way to change the stiffness of this flexure hinge is to modify the notch’s radius. A prototype of this novel flexure hinge has been manufactured and the measured characteristics prove the advantages of this proposed model. © 2001 American Institute of Physics.
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07.10.Cm Micromechanical devices and systems
06.60.Sx Positioning and alignment; manipulating, remote handling
02.70.Dh Finite-element and Galerkin methods

Charging current measurements and charging synchronization in continuous jets

J. Nilsson and L. Palm

Rev. Sci. Instrum. 72, 1574 (2001); http://dx.doi.org/10.1063/1.1336818 (6 pages) | Cited 1 time

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The phase relationship between droplet cutoff and stimulation of a continuous jet can be determined by pulsing the charging voltage during a time considerably shorter than the droplet formation period. The resulting charging current varies depending on when the pulse is applied in relation to droplet cutoff. By stepping the charging pulse over the complete droplet formation period the position of the droplet cutoff can be determined. The principle of the method is discussed and a high speed ac method is proposed for performing the measurements. The jets used in the experiments were 9.5 μm in diameter, traveling at around 53 m/s. The droplet formation frequency was around 1 MHz. © 2001 American Institute of Physics.
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84.37.+q Measurements in electric variables (including voltage, current, resistance, capacitance, inductance, impedance, and admittance, etc.)
41.20.Cv Electrostatics; Poisson and Laplace equations, boundary-value problems
47.27.wg Turbulent jets
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