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Oct 2001

Volume 72, Issue 10, pp. 3749-4008

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back to top ELECTRONICS; ELECTROMAGNETIC TECHNOLOGY; MICROWAVES

Efficient electromigration testing with a single current source

Choong-Un Kim, N. L. Michael, Qing-Tang Jiang, and Rod Augur

Rev. Sci. Instrum. 72, 3962 (2001); http://dx.doi.org/10.1063/1.1400153 (6 pages) | Cited 1 time

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This article introduces a simple and effective technique for conducting electromigration testing of a number of samples using a single current source. It is based on a configuration where all samples are serially connected to a single current source, allowing them to be subjected to identical current conditions. In this design, each sample has a current bypass circuit, consisting essentially of a computer controlled shunt relay and a Zener diode, to enable continuation of testing without any interruption in the test current when samples fail. With this technique, a large number of samples can be tested with the same current and excellent current stability, making it suitable for both reliability assessment and scientific investigation of electromigration mechanisms. Initial results show high correlation with industry standard testing systems. © 2001 American Institute of Physics.
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66.30.Qa Electromigration

Microspectroscopy and imaging using a delay line detector in time-of-flight photoemission microscopy

A. Oelsner, O. Schmidt, M. Schicketanz, M. Klais, G. Schönhense, V. Mergel, O. Jagutzki, and H. Schmidt-Böcking

Rev. Sci. Instrum. 72, 3968 (2001); http://dx.doi.org/10.1063/1.1405781 (7 pages) | Cited 46 times

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A method for microspectroscopy and energy-selective imaging using a special photoemission electron microscope (PEEM) is presented. A modified commercial PEEM was combined with a delay line device as x, y, t detector serving as the basic arrangement for spectromicroscopy. One can measure the time of flight of the electrons passing a drift section in order to analyze the energy distribution of photoelectrons in PEEM. The time of flight is referenced to the time structure of the synchrotron radiation from an electron storage ring. At electron kinetic energies of less than 20 eV within the drift region a spatial resolution of about 100 nm has been obtained. Fast counting electronics (instead of a camera) delivers an image for real-time monitoring on an oscilloscope screen or for image acquisition by a computer. A time resolution of about 500 ps has been obtained with the potential of further improvement. The spatial resolution of the delay line detector is about 50 μm in the image plane corresponding to 1000 pixels in the image diagonal. Direct photoemission from the W-4f core level of a W(110) single-crystal sample was observed at several photon energies. The W-4f fine-structure splitting of 2.3 eV could be well resolved at a pass energy around 40 eV through the drift region. © 2001 American Institute of Physics.
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07.78.+s Electron, positron, and ion microscopes; electron diffractometers
07.81.+a Electron and ion spectrometers
82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)
29.40.Gx Tracking and position-sensitive detectors
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