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Review of Scientific Instruments / Volume 70 / Issue 10 / ARTICLES / MICROSCOPY and IMAGING

Rev. Sci. Instrum. 70, 3967 (1999); http://dx.doi.org/10.1063/1.1150021 (3 pages)

Calibration of rectangular atomic force microscope cantilevers

John E. Sader1, James W. M. Chon2, and Paul Mulvaney2

1Department of Mathematics and Statistics, University of Melbourne, Parkville, 3052 Victoria, Australia
2School of Chemistry, University of Melbourne, Parkville, 3052 Victoria, Australia

(Received 20 April 1999; accepted 1 July 1999)

A method to determine the spring constant of a rectangular atomic force microscope cantilever is proposed that relies solely on the measurement of the resonant frequency and quality factor of the cantilever in fluid (typically air), and knowledge of its plan view dimensions. This method gives very good accuracy and improves upon the previous formulation by Sader et al. [Rev. Sci. Instrum. 66, 3789 (1995)] which, unlike the present method, requires knowledge of both the cantilever density and thickness. © 1999 American Institute of Physics.

© 1999 American Institute of Physics

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KEYWORDS and PACS

Keywords

atomic force microscopy, calibration, micromechanical resonators, Q-factor measurement

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1150021

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    J. L. Hutter and J. Bechhoefer, Rev. Sci. Instrum. 64, 1868 (1993)RSINAK000064000007001868000001.

    J. P. Cleveland, S. Manne, D. Bocek, and P. K. Hansma, Rev. Sci. Instrum. 64, 403 (1993)RSINAK000064000002000403000001.

    J. E. Sader, I. Larson, P. Mulvaney, and L. R. White, Rev. Sci. Instrum. 66, 3789 (1995)RSINAK000066000007003789000001.

    J. E. Sader, J. Appl. Phys. 84, 64 (1998)JAPIAU000084000001000064000001.

    D. A. Walters, J. P. Cleveland, N. H. Thomson, P. K. Hansma, M. A. Wendman, G. Gurley, and V. Elings, Rev. Sci. Instrum. 67, 3583 (1996)RSINAK000067000010003583000001.

    J. E. Sader and L. White, J. Appl. Phys. 74, 1 (1993)JAPIAU000074000001000001000001.

    J. E. Sader, Rev. Sci. Instrum. 66, 4583 (1995)RSINAK000066000009004583000001.

    J. M. Neumeister and W. A. Ducker, Rev. Sci. Instrum. 65, 2527 (1994)RSINAK000065000008002527000001.


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