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Jan 1995

Volume 66, Issue 1, pp. 1-949

Page 2 of 13 Pages Previous Page Next Page | Jump to Page

Single shot charge analyzer for laser‐produced plasma studies

Y. Y. Tsui, R. Fedosejevs, and A. A. Offenberger

Rev. Sci. Instrum. 66, 148 (1995); http://dx.doi.org/10.1063/1.1145248 (6 pages)

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The theory and design of a single shot charge analyzer is described which is capable of separating a multispecies ion beam from an instantaneous point source of plasma, such as laser‐produced plasma, into several single species ion beams. A time‐dependent deflection in planar geometry is employed which continuously steers each ion beam into a separate Faraday cup. Two important processes, space charge spreading of the ion beams and charge exchange with background gas in the chamber, that may alter the performance of the analyzer, are studied in detail. The charge state distribution of a laser‐produced plasma obtained by this device is compared to that obtained by a 45° electrostatic analyzer using multiple laser shots. © 1995 American Institute of Physics.
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52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
41.85.Qg Particle beam analyzers, beam monitors, and Faraday cups

Flush‐mounted probes in the divertor plates of Tokamak de Varennes

James P. Gunn, Claude Boucher, Barry L. Stansfield, and Sylvio Savoie

Rev. Sci. Instrum. 66, 154 (1995); http://dx.doi.org/10.1063/1.1145249 (6 pages) | Cited 18 times

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Arrays of 12 flush‐mounted Langmuir probes have been installed in both the upper and lower outboard divertor plates of TdeV (Tokamak de Varennes). Measurements of electron temperature and density are obtained using a novel method of analysis which assumes that charge collection is dominated by the finite size of the electrostatic sheath. The technique is validated by comparing measurements from a cylindrical and a flush probe which are operated simultaneously in the same plasma. © 1995 American Institute of Physics.
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52.70.Ds Electric and magnetic measurements
52.55.Fa Tokamaks, spherical tokamaks

Production of centimeter‐scale, high‐density plasmas with a linear gas jet

C. A. Coverdale, C. B. Darrow, R. Jones, W. Sawyer, J. Crane, T. Ditmire, M. D. Perry, and P. C. Filbert

Rev. Sci. Instrum. 66, 160 (1995); http://dx.doi.org/10.1063/1.1145251 (4 pages) | Cited 1 time

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A novel linear gas jet has been developed and used to produce centimeter‐scale, 1019 cm−3 electron density plasmas. Long regions of high density are important to many types of experiments, including x‐ray laser and laser‐plasma interaction studies. This new type of gas jet has been characterized by stimulated Raman backscatter emission from the plasma. © 1995 American Institute of Physics.
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52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.38.-r Laser-plasma interactions

Highly accurate electrical resistance measurement apparatus for high temperature

H. Osono and T. Kino

Rev. Sci. Instrum. 66, 164 (1995); http://dx.doi.org/10.1063/1.1145252 (4 pages) | Cited 1 time

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In order to investigate the details of an atomic configuration in metals and alloys, a precise electrical resistance measurement apparatus at high temperatures was constructed. Accuracy of temperature control is found to be 0.01 °C at around 300 °C, and the accuracy of the electrical resistivity measurement is 0.01 nΩ cm for an aluminum sample which has an electrical resistivity of 6×103 nΩ cm at around 300 °C. Using the apparatus, thermal generation of a vacancy at 320 °C in a highly perfect aluminum crystal was detected. © 1995 American Institute of Physics.
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07.50.-e Electrical and electronic instruments and components
07.20.Ka High-temperature instrumentation; pyrometers
72.15.Eb Electrical and thermal conduction in crystalline metals and alloys
61.72.J- Point defects and defect clusters

A thermosensitive quartz resonator with a built‐in microheater as a multipurpose sensor

Lozan Spassov, Dimitar Y. Yankov, Vesselin Georgiev, Eduard Yossifov, and Lazar Vergov

Rev. Sci. Instrum. 66, 168 (1995); http://dx.doi.org/10.1063/1.1145253 (3 pages) | Cited 2 times

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A design of a thermosensitive quartz resonator with a built‐in microheater is suggested. The resonator uses a piezoelement of a special crystal cut and has a very high‐temperature sensitivity. Because of the linear temperature‐frequency characteristic of the resonator, it can be used as a temperature sensor in a wide temperature range—from −20 to 100 °C. The change of the heater’s input power at a constant ambient temperature leads to a corresponding resonator’s frequency change. Because of the linearity of the resonator’s temperature‐frequency characteristic the power‐frequency dependence is also linear. In such a way the resonator can be utilized as an electrical power meter in the range of 0–400 mW with a sensitivity of about 136 Hz/mW. Using the heater, the resonator can be heated to temperatures higher than the ambient temperature. If the resonator is placed in a path of a flowing liquid, the liquid flow cools the resonator and causes a frequency change, related to the flow rate. The dependence of the resonator’s temperature change on the water flow rate at different input powers has been studied in the range of 0.1–1.2 m/s. © 1995 American Institute of Physics.
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07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
07.20.Dt Thermometers
47.80.-v Instrumentation and measurement methods in fluid dynamics

Novel high‐temperature Calvet‐type calorimeter for investigating metal‐water reactions

Michael C. Bradford, Jonathan Phillips, and Martin Klanchar

Rev. Sci. Instrum. 66, 171 (1995); http://dx.doi.org/10.1063/1.1145254 (5 pages) | Cited 2 times

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The initial operation of a Calvet‐type calorimeter is reported. The instrument has been designed specifically to study lithium and lithium compound reactions with water at an elevated temperature. Additionally, the calorimeter test section incorporates an environment that resembles actual application conditions. Calibration procedures are explained for three important parts of the instrument, including (1) introduction of the water sample, (2) analysis of the effluent gas, and (3) measurement of the heat of reaction. Ten measurements of the heat of the lithium oxide‐water reaction yielded values from 110 to 140 kJ/mol H2O and averaged 124 kJ/mol H2O. The average is in perfect agreement with the theoretical heat value computed utilizing JANAF thermochemical data. © 1995 American Institute of Physics.
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07.20.Fw Calorimeters
82.60.Cx Enthalpies of combustion, reaction, and formation

Measurement of thermal diffusivity of thin films and foils using a laser scanning microscope

T. Kemp, T. A. S. Srinivas, R. Fettig, and W. Ruppel

Rev. Sci. Instrum. 66, 176 (1995); http://dx.doi.org/10.1063/1.1145255 (6 pages) | Cited 4 times

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A novel method for measuring the thermal diffusivity of free‐standing foils and thin films is described and has been used to measure the thermal diffusivity of gold and amorphous silicon foils. The method involves scanning the surface of the film using a sinusoidally modulated, finely focused laser beam and monitoring the thermovoltage developed at a fixed point on its surface. A thermal wave spreads out from the point where the laser spot irradiates the foil which depends only on the thermal properties of the film material and the modulation frequency. Measuring the phase of the thermovoltage, which in turn is generated due to the thermal wave, the thermal diffusivity of the films was determined. The experiments were performed in vacuum so that convective heat losses could be neglected. The thermal diffusivity of 100‐nm‐thick gold foils was found to be 1.17×10−4 m2/s and that of 200‐nm‐thick amorphous silicon foils was determined to be 0.062×10−4 m2/s. © 1995 American Institute of Physics.
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07.20.-n Thermal instruments and apparatus
42.62.-b Laser applications
65.20.-w Thermal properties of liquids
65.40.gd Entropy

Measurement of thermal diffusivities through processing of infrared images

I. Philippi, J. C. Batsale, D. Maillet, and A. Degiovanni

Rev. Sci. Instrum. 66, 182 (1995); http://dx.doi.org/10.1063/1.1146432 (11 pages) | Cited 22 times

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The measurement of the thermal diffusivity of a thin layer in the direction of its plane is usually a difficult operation. The standard ‘‘flash technique’’ is very appropriate for diffusivity measurement in the direction of the thickness of the sample but adaptations of this method to in‐plane measurements remain very sensitive to the position and form of heat excitation and temperature sensors. The new procedure proposed here consists of applying any geometrically nonuniform heat impulse on the front face of the sample and recording the entire transient temperature image on the rear face thanks to an infrared camera. The influence of axial diffusion can be avoided for periods much longer than the axial diffusion characteristic time. Integral transforms on the radial space variables (Fourier transform) are very suitable for treating the temperature field and to estimate radial diffusivity. The main advantage of this method is to avoid any experimental precaution (no knowledge of the geometrical form of the excitation ‐ replacement of the sensor positioning by an image calibration). Furthermore, the considerable number of data produced by the camera is processed using a statistical approach. The validation of the method is made on a homogeneous sample by comparison between the in‐plane direction measurements (obtained with the present procedure) and the thickness direction measurements (obtained by the classical flash technique). © 1995 American Institute of Physics.
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07.20.-n Thermal instruments and apparatus
42.30.Va Image forming and processing

New apparatus for thermal diffusivity measurements of refractory solid materials by the periodic stationary method

J. Khedari, P. Benigni, J. Rogez, and J. C. Mathieu

Rev. Sci. Instrum. 66, 193 (1995); http://dx.doi.org/10.1063/1.1145256 (6 pages) | Cited 13 times

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An apparatus for the thermal diffusivity measurement of refractory solids at high temperatures (800–1800 K) by the periodic stationary method is presented. A cylindrical geometry for the sample has been chosen. The radial heat flow through the measurement cell is sine modulated and induces a thermal sine wave over the lateral side of the sample. The thermal diffusivity is determined from the measurement of the phase change and the amplitude ratio between two points of the sample. Thus, the thermal diffusivity can be obtained in two manners. The difference between these results is a criterium for the validity of the measurement. Experimental results on a sample of a cordierite based sintered material (Cecorite 130P) are presented. They show good agreement with the results of the CODATA Task Group on Thermophysical Properties. © 1995 American Institute of Physics.
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07.20.Ka High-temperature instrumentation; pyrometers
66.30.-h Diffusion in solids

Highly sensitive method for simultaneous measurements of thermal conductivity and thermoelectric power: Fe and Al examples

H. Bougrine and M. Ausloos

Rev. Sci. Instrum. 66, 199 (1995); http://dx.doi.org/10.1063/1.1145257 (8 pages) | Cited 16 times

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The main purpose of this work is to present a highly sensitive method for measuring simultaneously thermal conductivity and thermoelectric power in a 4.2–300 K temperature range, and to discuss the errors made in measurements of such quantities due to radiation and convection losses. An experimental setup is presented in detail and discussed. It is emphasized how in this quasi‐steady‐state method, the residual heat flow and temperature difference between various components are taken into account. Measurements of the thermal conductivity and thermoelectric power of Fe are presented for such a setup with and without radiation shields, and for high or low vacuum in the range 70–300 K. The best conditions are then used for measuring these properties in Al. Brief comparison is made to existing data. © 1995 American Institute of Physics.
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07.20.-n Thermal instruments and apparatus
72.15.Eb Electrical and thermal conduction in crystalline metals and alloys
72.15.Jf Thermoelectric and thermomagnetic effects

Performance analysis of a fiber optic accelerometer based on a compliant cylinder design

R. D. Pechstedt and D. A. Jackson

Rev. Sci. Instrum. 66, 207 (1995); http://dx.doi.org/10.1063/1.1145259 (8 pages) | Cited 7 times

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The performance of an all fiber accelerometer, based on a compliant cylinder design and operating at λ0=1.3 μm is described. Sub‐μg/√Hz resolution in a frequency range from 10 to 250 Hz has been demonstrated. The measured dynamic range exceeds six orders of magnitude. Faraday rotation mirrors have been incorporated into the accelerometer to prevent signal fading due to random changes in the state of polarization of the guided beams. Test results at elevated temperatures are presented. © 1995 American Institute of Physics.
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06.30.Gv Velocity, acceleration, and rotation
93.85.-q Instruments and techniques for geophysical research: Exploration geophysics
07.60.Vg Fiber-optic instruments

Simple, high‐resolution interferometer for the measurement of frequency‐dependent complex piezoelectric responses in ferroelectric ceramics

Jie‐Fang Li, P. Moses, and D. Viehland

Rev. Sci. Instrum. 66, 215 (1995); http://dx.doi.org/10.1063/1.1145261 (7 pages) | Cited 31 times

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In this paper, we report the development of a simple but precise piezoelectric spectrometer using a Michelson–Morley interferometer. The measurement system has been developed to study the frequency and temperature dependence of the complex piezoelectric and electrostriction coefficients of ferroelectric materials. The spectral data are collected by computer and has significantly wider frequency range and lower noise than other such systems. Results are reported for a quartz sample, a La‐modified lead zirconate titanate ferroelectric, and a lead zirconate titanate sol‐gel derived ferroelectric thin film. © 1995 American Institute of Physics.
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77.65.Bn Piezoelectric and electrostrictive constants
77.84.Ek Niobates and tantalates
77.84.Cg PZT ceramics and other titanates
77.84.Bw Elements, oxides, nitrides, borides, carbides, chalcogenides, etc.
07.60.Ly Interferometers

New optical cell design for laser flash photolysis studies in supercritical fluids

Qin Ji, Edward M. Eyring, Rudi van Eldik, Kedika Bal Reddy, Steven R. Goates, and Milton L. Lee

Rev. Sci. Instrum. 66, 222 (1995); http://dx.doi.org/10.1063/1.1145262 (5 pages) | Cited 12 times

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A high‐pressure optical cell has been designed that achieves an effective separation between the chemical sample and the pressurizing medium and system. This design limits possible sample contamination and catalytic effects under supercritical fluid sample conditions. Laser flash photolysis experiments were carried out on molybdenum hexacarbonyl dissolved in supercritical CO2. The thermal ring closure reaction of the species Mo(CO)5L, where L is 2,2′‐bipyridine was found to proceed at rates comparable to those measured previously in liquid benzene or toluene. Much larger activation volumes were found for the reaction in supercritical CO2 than in liquid toluene. © 1995 American Institute of Physics.
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07.60.-j Optical instruments and equipment
82.50.Bc Processes caused by infrared radiation
82.50.Hp Processes caused by visible and UV light
07.35.+k High-pressure apparatus; shock tubes; diamond anvil cells

Novel photoacoustic Stark cell

A. Thöny and M. W. Sigrist

Rev. Sci. Instrum. 66, 227 (1995); http://dx.doi.org/10.1063/1.1145263 (5 pages) | Cited 1 time

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In order to further enhance the detection selectivity of a mobile CO2‐laser photoacoustic (PA) system for air monitoring we have developed a novel type of Stark cell and an appropriate power supply that provides variable dc and ac high voltages. The special design of the electrode profile enables the operation of the cell with electric field strengths of up to 16.7 kV/cm at atmospheric pressure without any appearance of arcing. The Stark PA cell is of special interest for the detection of compounds exhibiting a permanent electric dipole moment such as ammonia. We present results on the absorption of ammonia, ethene, and nonabsorbing synthetic air derived from PA measurements with variable dc and/or ac electric field applied. Good agreement with theoretical predictions is obtained. © 1995 American Institute of Physics.
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07.88.+y Instruments for environmental pollution measurements
82.80.Kq Energy-conversion spectro-analytical methods (e.g., photoacoustic, photothermal, and optogalvanic spectroscopic methods)

Noncontact thermoacoustic method to measure the magnetocaloric effect

B. R. Gopal, R. Chahine, M. Földeàki, and T. K. Bose

Rev. Sci. Instrum. 66, 232 (1995); http://dx.doi.org/10.1063/1.1145264 (7 pages) | Cited 15 times

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We report here the measurement of the magnetocaloric effect in a magnetic material with the use of noncontact type detection. The technique is based on the thermoacoustic principle. A sample with a periodically changing surface temperature induces exponentially decaying pressure waves which can be detected by a sensitive microphone. A magnetic material placed within a gas‐tight cell at an appropriate dc magnetic field and temperature will exhibit a periodically changing surface temperature due to the magnetocaloric effect when subjected to a small ac field superimposed over the dc field. The microphone response, detected via a lock‐in amplifier can be correlated to the magnitude of the temperature changes after suitable calibration. The knowledge of the magnetic equation of state allows the determination of the total magnetocaloric effect ΔT for an arbitrary field step from zero to the final value, using the magnetization data of the sample as well. Gadolinium has been used for calibration, and new results are presented for a gadolinium‐dysprosium and a gadolinium‐erbium alloy. © 1995 American Institute of Physics.
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75.30.Sg Magnetocaloric effect, magnetic cooling
75.50.Cc Other ferromagnetic metals and alloys
43.35.Ud Thermoacoustics, high temperature acoustics, photoacoustic effect

Portable instrument employing a surface acoustic wave sensor with a regenerable reagent coating for direct measurement of 1,3‐butadiene and styrene

Guo‐Zheng Zhang and Edward T. Zellers

Rev. Sci. Instrum. 66, 239 (1995); http://dx.doi.org/10.1063/1.1146489 (8 pages)

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The design and preliminary laboratory testing of a prototype portable instrument capable of near‐real‐time measurement of selected airborne olefins and dienes at low‐ and sub‐ppm concentrations is described. The sensor employed is a 60‐MHz surface‐acoustic‐wave (SAW) oscillator coated with a Pt‐olefin coordination compound having the formula trans‐PtCl2(olefin)(pyridine) (olefin=1‐hexene or ethylene). The continual mass change that occurs upon replacement of the initially coordinated olefin by the olefin or diene analyte leads to a commensurate change in the output frequency of the SAW sensor. Analyte air concentrations can be determined therefore by measuring the rate of frequency change. In tests with 1,3‐butadiene and styrene the instrument provided linear response isotherms from 0.050 to 3.0 and 0.60 to 50 ppm, respectively, and calculated detection limits of 0.043 and 0.28 ppm, respectively, based on a 10 s measurement interval. Repeated regeneration of the reagent sensor coating is accomplished automatically by brief exposure to a high concentration of the initially coordinated olefin generated from a reservoir that can be housed within the instrument. © 1995 American Institute of Physics.
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07.88.+y Instruments for environmental pollution measurements
82.80.Kq Energy-conversion spectro-analytical methods (e.g., photoacoustic, photothermal, and optogalvanic spectroscopic methods)
43.38.Rh Surface acoustic wave transducers

Method for making electrical contacts to hard and reactive intermetallic compounds

I. R. Walker

Rev. Sci. Instrum. 66, 247 (1995); http://dx.doi.org/10.1063/1.1145265 (4 pages) | Cited 1 time

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A method is described for making electrical contacts to metallic materials which, because of their hardness and reactivity, can be very difficult to attach leads to using other techniques. These metals, including some of the heavy fermion materials, form inert and tightly bonded oxide layers which hinder the use of ordinary soldering methods. It has been found that a simple modification to an ordinary soldering iron, involving the replacement of the standard copper tip with one made of tungsten carbide, enables these oxide layers to be penetrated and electrical contact to be made without the use of flux. The size of the resulting contacts can be very small and their electrical resistance very low. Other, less viable, techniques for making contacts are also discussed, and a means of holding samples in place during soldering is described. © 1995 American Institute of Physics.
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84.32.Dd Connectors, relays, and switches
07.50.-e Electrical and electronic instruments and components

Sensitivity analysis of junction field effect‐pressure Halltron

Dianzhong Wen

Rev. Sci. Instrum. 66, 251 (1995); http://dx.doi.org/10.1063/1.1145267 (5 pages)

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In this paper the pressure‐magneto‐electric effect of a junction field‐effect transistor (JFET) is discussed by using standard relaxation techniques. A theoretical evaluation of the pressure sensitivity and Hall sensitivity of n‐channel silicon JFET with various geometries(W/L), gate voltages(VCS), and drain voltages (VDC) is made. The results show that supposing W/L≤1/2−1, a junction field‐effect pressure sensor with high stability and low noise is designed. © 1995 American Institute of Physics.
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85.30.Tv Field effect devices
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Tuning a rotating wave resonator

Peter H. Ceperley and Jose E. Velazco

Rev. Sci. Instrum. 66, 256 (1995); http://dx.doi.org/10.1063/1.1145268 (5 pages)

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Creation of a rotating wave field in a high‐Q resonator usually requires the resonator to be tuned to compensate for manufacturing errors. The tuning of a rotating wave resonator is more complicated than that of a common resonator. A theory of tuning rotating wave resonators and a procedure for efficiently carrying out this tuning is presented in this paper, along with the authors’ experience in tuning a rotating TM110 mode in a 1.28 GHz microwave resonator. © 1995 American Institute of Physics.
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84.90.+a Other topics in electronics, radiowave and microwave technology, and direct energy conversion and storage (restricted to new topics in section 84)

Third harmonic generation through shaped superconductors

T. Badri Narayana and M. Satyam

Rev. Sci. Instrum. 66, 261 (1995); http://dx.doi.org/10.1063/1.1145269 (4 pages) | Cited 3 times

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This paper describes a methodology of obtaining only third harmonic along with the fundamental using shaped superconductors. It also indicates how one can design a nonlinear superconducting resistor with the required current versus resistance variation. © 1995 American Institute of Physics.
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84.32.Ff Conductors, resistors (including thermistors, varistors, and photoresistors)
85.25.Qc Superconducting surface acoustic wave devices and other superconducting devices

Optical pumping of a He(23S) metastable atom beam using a diode laser

C. D. Wallace, D. L. Bixler, T. J. Monroe, F. B. Dunning, and G. K. Walters

Rev. Sci. Instrum. 66, 265 (1995); http://dx.doi.org/10.1063/1.1145270 (2 pages) | Cited 4 times

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Use of a commercial 1.083 μm laser diode to optically pump a collimated He (23S) metastable atom beam is described. Stable, efficient optical pumping is achieved resulting in polarizations that approach 100%. © 1995 American Institute of Physics.
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32.80.Xx Level crossing and optical pumping
42.62.-b Laser applications

Sample load‐lock and manipulation system with heating capacity

E. V. Alonso, J. J. Jiménez‐Rodríguez, and A. M. C. Pérez‐Martín

Rev. Sci. Instrum. 66, 267 (1995); http://dx.doi.org/10.1063/1.1145271 (2 pages)

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An apparatus consisting basically of a fast entry load‐lock system with sample manipulation and heating capacity is described. Special attention is paid to the differential pumping details and the sample heating. This low‐cost system is within the possibilities of tradesmen and workshops. © 1995 American Institute of Physics.
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07.30.Kf Vacuum chambers, auxiliary apparatus, and materials
06.60.Sx Positioning and alignment; manipulating, remote handling

Method for evaluating sharpness of tip apex of a cantilever for the atomic force microscope

Y. Umehara, Y. Ogiso, K. Chihara, K. Mukasa, and P. E. Russell

Rev. Sci. Instrum. 66, 269 (1995); http://dx.doi.org/10.1063/1.1145272 (2 pages) | Cited 3 times

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A chemically textured alumite disk with micropillar posts on its surface is found to be a good standard sample to evaluate sharpness of atomic force microscope tips in the range of a few to a few tens of nm. The tips evaluated were silicon nitride cantilever with a normal pyramidal tip, one with a carbon microtip deposited by the electron beam method and one with a microtip formed by the focused ion beam method (FIB tip). The FIB tip has a fairly sharp tip apex so it can show very fine ridges around micropillars precisely. © 1995 American Institute of Physics.
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07.79.Lh Atomic force microscopes

Simple transmission mode near‐field optical microscope

Wunshain Fann

Rev. Sci. Instrum. 66, 271 (1995); http://dx.doi.org/10.1063/1.1145273 (2 pages) | Cited 4 times

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A simple transmission mode near‐field optical microscope is demonstrated. A low noise, large area Si photodetector is mounted directly between the piezoelectric transducer scanning stage and the sample. This method provides a simple way to convert the commercial atomic force microscope/scanning tunneling microscope scanning stage to a near‐field optical microscope. © 1995 American Institute of Physics.
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07.79.Fc Near-field scanning optical microscopes

Radio‐frequency hollow cathode etching reactor with multipolar confinement

O. Kessi and S. Djahièche‐Nencib

Rev. Sci. Instrum. 66, 273 (1995); http://dx.doi.org/10.1063/1.1145278 (2 pages)

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A magnetically enhanced radio‐frequency (13.56 MHz) triode plasma reactor with ‘‘multitubes hollow’’ cathode is characterized by measuring the self‐bias potential Vdc and the saturation ion current density Js as a function of SF6 pressure and incident power. The cathode shape allows a decreasing of Vdc and an increasing of Js. For a power of 600 W and a pressure of 15 mTorr, Vdc does not exceed 200 V and Js is about 0.6 mA cm−2. © 1995 American Institute of Physics.
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52.77.Bn Etching and cleaning
52.77.Dq Plasma-based ion implantation and deposition
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