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Review of Scientific Instruments / Volume 64 / Issue 7

Rev. Sci. Instrum. 64, 1868 (1993); http://dx.doi.org/10.1063/1.1143970 (6 pages)

Calibration of atomic‐force microscope tips

Jeffrey L. Hutter and John Bechhoefer

Department of Physics, Simon Fraser University, Burnaby, British Columbia, V5A 1S6, Canada

(Received 29 March 1993; accepted 12 April 1993)

Images and force measurements taken by an atomic‐force microscope (AFM) depend greatly on the properties of the spring and tip used to probe the sample’s surface. In this article, we describe a simple, nondestructive procedure for measuring the force constant, resonant frequency, and quality factor of an AFM cantilever spring and the effective radius of curvature of an AFM tip. Our procedure uses the AFM itself and does not require additional equipment.

ERRATUM

  1. Erratum: ``Calibration of atomic-force microscope tips'' [Rev. Sci. Instrum. 64, 1868 (1993)]
    Jeffrey L. Hutter et al.
    Rev. Sci. Instrum. 64, 3342 (1993)RSINAK000064000011003342000001

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KEYWORDS and PACS

Keywords

ATOMIC FORCE MICROSCOPY, CALIBRATION, QUALITY FACTOR, PROBES, RESONANCE, SILICON NITRIDES, MICA, VAN DER WAALS FORCES

PACS

  • 68.37.Ef

    Scanning tunneling microscopy (including chemistry induced with STM)

  • 68.37.Ps

    Atomic force microscopy (AFM)

  • 68.37.Rt

    Magnetic force microscopy (MFM)

  • 68.37.Uv

    Near-field scanning microscopy and spectroscopy

  • 87.64.Dz

    Scanning tunneling and atomic force microscopy

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1143970

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

For access to fully linked references, you need to log in.
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    Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987JAPIAU000061000010004723000001).

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    H. Kado, K. Yokoyama, and T. Tohda, Rev. Sci. Instrum. 63, 3330 (1992RSINAK000063000006003330000001).

    M. Fotino, Rev. Sci. Instrum. 64, 159 (1993RSINAK000064000001000159000001).

    A method for measuring the spring constant of cantilevers, different from ours, has recently been published. See J. P. Cleveland, S. Manne, D. Bocek, and P. K. Hansma, Rev. Sci. Instrum. 64, 403 (1993RSINAK000064000002000403000001).

    N. A. Burnham, D. D. Dominguez, R. L. Mowery, and R. J. Colton, Phys. Rev. Lett. 64, 1931 (1990).

    J. L. Hutter and J. Bechhoefer, J. Appl. Phys. 73, 4123 (1993JAPIAU000073000009004123000001).

    Y. Li and S. M. Linday, Rev. Sci. Instrum. 62, 2630 (1991RSINAK000062000011002630000001).

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    S. J. O'Shea and M. E. Welland, Appl. Phys. Lett. 60, 2356 (1992APPLAB000060000019002356000001).


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