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Review of Scientific Instruments / Volume 60 / Issue 1

Rev. Sci. Instrum. 60, 65 (1989); http://dx.doi.org/10.1063/1.1140580 (13 pages)

Improvements of phase‐modulated ellipsometry

O. Acher1, E. Bigan1, and B. Drévillon2

1Laboratoire Central de Recherche, Thomson‐CSF L.C.R., Domaine de Corbeville, 91401 Orsay, France
2Laboratoire de Physique des Interfaces et des Couches Minces, Ecole Polytechnique (ER 258 du CNRS), 91128 Palaiseau, France

(Received 21 April 1988; accepted 25 August 1988)

This article gives several new insights on ellipsometers using photoelastic modulators. The assumption that the modulation has the form δ=δ0+A sin ωt is ruled out. In contrast, it is shown that the presence of higher harmonics in the modulation affects the measured signal. A new formalism is proposed to take this effect into account, and experimental evidences of its consistency and relevance are exposed. Using this multiple‐harmonic model, ellipsometric measurements showed a dispersion four to five times less than using the conventional model. A new method is proposed to adjust the modulation amplitude during the measurements, by measuring the third harmonic of the signal. It is proven experimentally that this method actually improves the precision of phase‐modulated ellipsometry. Other sources of errors are reviewed, such as multiple reflections in coherent light. A practical procedure to test whether a modulator is well adapted to ellipsometry is given.

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KEYWORDS and PACS

Keywords

ELLIPSOMETERS, OPTICAL MODULATORS, ELLIPSOMETRY, PHASE MODULATION, PHOTOELASTICITY, MODIFICATIONS, RELIABILITY, PERFORMANCE

PACS

  • 07.60.Fs

    Polarimeters and ellipsometers

  • 42.30.Lr

    Modulation and optical transfer functions

  • 42.79.Hp

    Optical processors, correlators, and modulators

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1140580

PUBLICATION DATA

ISSN

0034-6748 (print)  
1089-7623 (online)

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    References

    S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instrum. 40, 761 (1969RSINAK000040000006000761000001).

    B. Drévillon, J. Perrin, R. Marbot, A. Violet, and J. L. Dalby, Rev. Sci. Instrum. 53, 969 (1982RSINAK000053000007000969000001).

    G. E. Jellison and F. A. Modine, J. Appl. Phys. 53, 3745 (1982JAPIAU000053000005003745000001).


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