Fabrication of sharp tungsten-coated tip for atomic force microscopy by ion-beam sputter deposition
Yukinori Kinoshita, Yoshitaka Naitoh, Yan Jun Li, and Yasuhiro Sugawara
Tungsten tips made from tungsten wires have been used very frequently for Field Ion Microscopy(FIM) and Atom-Probe (FIM). Si cantilevers have been much used for Atomic Force Microscopy (AFM). One reason for this is that they can be lithographically made, for example, as a ganged set. This paper shows how to wed these two technologies. This development has the potential to significantly impact both AFM and FIM.